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Gas Flow Calibration Primary Standard for Semiconductor Industry
CalTrak®850
- For semiconductor industry corrosive & toxic gases
- Primary standard flow results directly traceable to NIST
- Bring +/- 0.15% of reading accuracy to the fab floor
- Portable and battery operated
- Quick, easy to use, automatic data capture
Overview
Sierra’s CalTrak 850® is an all-in-one primary standard for corrosive or toxic gases. The 850 is designed to calibrate and verify the mass flow meters and mass flow controllers commonly used in the semiconductor industry to bring high-accuracy straight to the factory floor. The design of the 850 allows for this increased flexibility and speed of reading. Three tubes sit horizontally in the instrument and are fitted with boroscilicate glass pistons to quickly and accurately measure gas flow rates.
The 850 is manufactured to ISO 17025 standards at a NVLAP accredited lab using assets that are directly traceable to NIST. The dimensionally-based primary accuracy of the 850 surpasses pressure-based secondary methods and is backed by a rigorous uncertainty analysis.
Operating principal:
All of our CalTrak models contain a nearly frictionless graphite piston that moves freely inside a borosilicate glass tube. When the parallel bypass valve is closed, the gas flow is directed into the tube to push the piston up (Note: Draw new figure 1 from datasheet and add). Two photo-optic sensors detect the piston as it travels past.
The distance the piston travels between the two sensors is precisely defined and represents a known volume. Accurate crystal-based timers drive a microprocessor which calculates the rate of rise. This defines the volumetric flow rate. At the same time, extremely accurate temperature and absolute pressure sensors collect data used to calculate the mass flow rate.
Product Benefits
- The performance of only the highest level metrology laboratories can now be yours
- Designed for the Semicon industry corrosive & toxic gases
- Flexible all-in-one multiple cells eliminates switching cells
- Highest accuracy primary standard for labs & industry (compare at +/- 0.15% of reading)
- Proven dimensionally-based primary standard accuracy backed by a rigorous uncertainty analysis
- Manufactured to ISO 17025 Standards at a NVLAP accredited lab
- Collected data is directly traceable to NIST
- Surpasses pressure-based secondary methods
- Everything you need to do your own flow calibration
- Less expensive than most popular secondary standards
- Field portable and battery powered
- Accurate and reliable gas flow readings independent of gas species measured
- Reading options: Single, continuous or burst, with user-selectable averaging from 1 to 100
- Run automatically in continuous mode or operate manually (one flow reading at a time)
- Take up to up to 100 measurements in an average continuous mode sequence
- Easy to use, large LCD readout screen and 23-button keypad
- Generates Calibration Certificate easily
- Communicate via RS-232, USB, and use free CalSoft® software included
- CalSoft® software automatically acquires flow data for easy data export
- No Mercury or other hazardous materials
- Low maintenance
Specifications
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*Note: At gas pressure of 760 mmHg, (1 atm ) and a gas temperature of 25°C (77°F) with standardization temperature set to 21.1 °C (69.98°F)
Documents & Downloads
Datasheets(1) | |||
| File Title | Version | Release Date | |
|---|---|---|---|
| CalTrak 850 Technical Datasheet | A | 03/25/2014 | |
Manuals(1) | |||
| File Title | Version | Release Date | |
| CalTrak 850 Instruction Manual | v2 | 04/02/2015 | |
Software(2) | |||
| File Title | Version | Release Date | |
| CalTrak Command Set: Bi-Directional Communications Protocol | 1.0 | 04/06/2015 | |
| CalTrak Series Product Software | v1.0 | 03/24/2014 | |
Certificates(1) | |||
| File Title | Version | Release Date | |
RoHS 3, REACH, and WEEE Compliance | 2.0 | 09/20/2021 | |
Additional Documentation(1) | |||
| File Title | Version | Release Date | |
Full Line Product Offering | V4 | 08/03/2023 | |
