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Mass Flow Controller Selection Chart

Measures Any Gas Including Gas Mixtures, Toxics and Corrosives

Accurately controlling the gas flow in your application—whether it’s a gas mixture, toxic gas or corrosive—starts with selecting the right MFC. Sierra’s precision instruments are ideal for very low flows (i.e. 0-10 sccm) as well as higher full-scale flow ranges up to 1000 slpm. High-accuracy digital gas blending and dilution systems offer an accurate and easy solution for multiple gas mixing. Use the gas flow chart below to find the right Sierra flow mass controller for your requirements.

How to read this chart

SmartTrak 100
C100H
 
100 to 1000 slpm
C100M
 
20 to 300 slpm
C100L
10 sccm to 50 slpm
 
 
  • Our Flagship MFC
  • Digital Mass Flow Controller
  • Multi Gas, User Programmable
  • Pilot Module Interface
SmartTrak 50
C50L
10 sccm to 50 slpm
 
 
C50M
 
50 to 200 slpm
  • Off-the-Shelf Delivery
  • 316 SS
  • Digital High Performance
MassTrak 810
810C
10 sccm to 15 slpm
 
 
  • Low Pressure Drop
  • Great OEM Choice
  • Easy to Read Display
SideTrak 840
840H
 
100 to 500 slpm
840M
 
15 to 100 slpm
840L
10 sccm to 15 slpm
 
 
  • Low Pressure Drop
  • Rugged and Reliable
  • Ideal Replacement for Older Flow Meter
MicroTrak 101
C101
0.1 sccm to 4 sccm
 
 
  • Ultra-Low Flows
  • Pilot Module Interface
  • Multi Gas, User Programmable
MaxTrak 180
C180H
 
100 to 1000 slpm
C180M
 
10 to 300 slpm
  • Industrial MFC
  • NEMA 4X IP65
  • Multi Gas, User Programmable
100 HP
C100HP
 
100 sccm to 20 slpm
  • Ultra High Pressure
  • Digital Mass Flow Controller
  • Pilot Module Interface
  • User Programmable
SmartTrak 140
C140
 
10 to 500 slpm
  • Ultra-Low Pressure Drop
  • Digital Mass Flow Controller
  • Multi Gas, User Programmable
  • Pilot Module Interface
Flow

NOTE: Graphs not to scale.

All controllers will measure and control accurately down to 2% of full scale flow rate.

Q: How does a mass flow controller work?

A: Thermal mass flow technology is an industry standard for mass flow control of gases because it measures flow directly, at the molecular level. An MFC for gas automatically controls the flow rate at a given set point. A thermal mass flow controller is designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time. In essence, counting and controlling every gas molecule flowing through the instrument to achieve unmatched precision. Unaffected by upstream gas temperature and pressure fluctuations, gas mass flow control is direct and unequivocal.

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