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Micro-Trak™ Model 101 Ultra Low Flow Mass Flow Meters & Controllers
As today's science and engineering focus more and more on micro technology, the requirement to be able to measure and control extremely low gas mass flows has become very important. With state-of-the-art sensor technology and highly engineered direct acting valve design, Micro-Trak accurately measures and controls micro mass flows of gas previously thought by scientists to be too low for a repeatable reading.
Micro-Trak is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Micro-Trak is a specialized instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics.
Excellent accuracy (+/- 1.0% of full scale) and reliability (+/- 0.2%) coupled with unsurpassed instrument stability offer customers an instrument they can depend on, month after month, year after year.
| Unique Product Features |
- Suitable for most gases with flow rates down to 0.1 sccm (smlm)
- Accuracy of +/- 1.0% of full scale
- Repeatability of +/- 0.2% of full scale
- 316 Stainless steel construction
- Digital performance with maximum flexibility
- Primary Standard calibration and NIST traceability
- Dial-A-Gas Technology—10 preprogrammed gases or select your own
- Unique Pilot Module allows control and display of the following functions:
- Gas
- Setpoint value
- Setpoint source
- Engineering Units
- Output signal
- Valve state
- Full Scale value
- All functions also available via RS-232
- Traditional analog controls and outputs also included:
- 4-20 mA
- 0-5 VDC
- 1-5 VDC
- 0-10 VDC
- Small footprint makes installation easy
- 24 VDC power supply
- CE approval
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Technical Datasheet