Micro-Trak™ Model 101

Ultra Low Flow Mass Flow Meters & Controllers

As today's science and engineering focus more and more on micro technology, the requirement to be able to measure and control extremely low gas mass flows has become very important. With state-of-the-art sensor technology and highly engineered direct acting valve design, Micro-Trak accurately measures and controls micro mass flows of gas previously thought by scientists to be too low for a repeatable reading.

Micro-Trak is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Micro-Trak is a specialized instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics.  Micro-Trak is also available with an innovative and user-friendly Pilot Module, a front-mounted or hand-held control device that allows users to Dial-A-Gas®, change flow rate, modify engineering units or re-configure the instrument. With the Pilot Module, the user can set zero, span and full scale for each of 10 different gases independently to accommodate unexpected application or system design changes.


Add the Compod™ programmable control module to the Model 100 & Model 101 and get multi-drop RS-485/MODBUS RTU communications to greatly simplify basic flow control installations and permit networking of multiple instruments.

» Mass Flow Meter Selection Chart